In the high technological industries such as electronics, optical and biological industries, the newly developed commodities are manufactured with precise fabrication as a basic process.
Both production yield and product quality are, therefore, affected by invisible airborne particles or dust. For example in manufacturing of semiconductors, the design rule of ULSI is now minimized to the line width of submicron. In this case, the size of particle to be eliminated in the cleanroom is smaller than 0.05 μm, namely, 1/5 ~ 1/10 of the design rule, which means that only a super clean environment can be accepted for its production process.
Also, in food processing, medical or pharmaceuticals, how to control the micro-organism is a key point to maintain the quality, which can be performed by cleanroom.
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