Basic elements of Cleanroom

FAB Cleanroom

In the microelectronics industry a semiconductor fabrication plant (commonly called a fab; sometimes foundry) is a factory where devices such as integrated circuits are manufactured.

A business that operates a semiconductor fab for the purpose of fabricating the designs of other companies, such as fabless semiconductor companies, is known as a foundry. If a foundry does not also produce its own designs, it is known as a pure-play semiconductor foundry.

Fabs require many expensive devices to function. Estimates put the cost of building a new fab over one billion U.S. dollars with values as high as $3–4 billion not being uncommon. TSMC invested $9.3 billion in its Fab15 300 mm wafer manufacturing facility in Taiwan.[1]

HVAC	Make-UP Air, Recirculation Air, Temp & RH Control, Exhaust, Diff Pressure, Chilled Water, Steam System, Air Velocity, Air Change Rate
Archi	Raised Floor, EQ Layout, Vibration, Partition, Static Electricity, Magnetic Interference
Land	Soil Drilling, Soil Analysis, Vibration Measure
Public Utility	City Water, Power System, Road Transportation, Gas Line
Environment	Clean Room Management, House Keeping, Air Shower, Noise Control
Safety	Fire Alarm, Gas Detection, Safety Corridor, Fire Wall, Emergency Shower, Paging, Communication, Breathing Air
Power	High Tension Power, EQ Power, Lighting Power, Emergency Power, UPS
Facility	Supply, Chemical Dispense, Gas Supply, Process Cooling Water, Drain, Waste Water Treat, Waste Reclaim, Plant Vacuum

Cleanroom Features

Environment Conditions	Cleanliness, Temperature, Humidity, Pressure, Vibration, Noise, Easy to Clean and No Smell
Flexible Space	Static Elimination, Monitoring System, Standardized Cleaning, Rationalization Moving Lines
Prevention for Public Hazard & Disaster	Exhaust Gas Treatments Equipment, Wastewater Treatments Equipment, Poison Gas Dilution System, Noise Prevention and Countermeasures, Easy to Maintain, Evacuation Path Signal Board, Fire System, Emergency Shower, Eyewash System, Toxic Gas Detection System, Shockproof of Countermeasures
Continuous Operation	Back-up System, Power Failure Protection Equipment, Central Monitoring System, Energy Saving Plan

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